@article{article, title  = {{A LOW-COST DEEP-ULTRAVIOLET (UV) LIGHT-SOURCE FOR BILEVEL RESIST APPLICATIONS}},

 url = {{}},

 year = {{1987}},

 month = {{5}},

 author = {{POWELL AL and ROCKETT PI and ROBSON PN}},

 volume = {{5}},

 journal = {{J VAC SCI TECHNOL B}},

 issue = {{3}},

 pages = {{671-673}},

 note = {{Accessed on 2024/12/22}}}