TY  - CONF

T1  - Analysis of focused ion beam cut profiles by transmission electron microscopy

PY  - 2006/01/01

AU  - Walther T

AU  - Sehrbrock A

AU  - Quandt E

ED  - Ichinose H

ED  - Sasaki T

PB  - Publication Committee of IMC16

VL  - 2 (Instrumentation)

SP  - 1112

EP  - 1112

Y2  - 2024/12/22

ER  -