@inproceedings{inproceedings, title  = {{The chemistry of thin film deposits formed from hexamethyldisiloxane and hexamethyldisilazane plasmas}},

 publisher = {{WORLD SCIENTIFIC}},

 url = {{http://dx.doi.org/10.1142/9789814503914_0031 }},

 year = {{2014}},

 month = {{1}},

 author = {{Bushnell-Watson SM and Alexander MR and Ameen AP and Rainforth WM and Short RD and Jones FR and Michaeli W and Stollenwerk M and Mathar G and Zabold J}},

 doi = {{10.1142/9789814503914_0031}},

 journal = {{The Mechanics of Thin Film Coatings}},

 note = {{Accessed on 2024/12/22}}}