@inproceedings{inproceedings, title = {{Non-planar photolithography using digital holograms}}, url = {{}}, year = {{2006}}, month = {{1}}, author = {{McWilliam R and Johnson S and Maiden A and Purvis A and Luke Seed N and Williams GL and Ivey PA}}, isbn = {{9781557528186}}, journal = {{Optics InfoBase Conference Papers}}, note = {{Accessed on 2024/12/22}}}