@article{article, title = {{Fabrication of Photonic Crystal Structures on GaAs by Single Pulse Laser Interference Lithography}}, publisher = {{Japan Laser Processing Society}}, url = {{http://dx.doi.org/10.2961/jlmn.2024.02.2007 }}, year = {{2024}}, month = {{9}}, author = {{}}, doi = {{10.2961/jlmn.2024.02.2007}}, journal = {{Journal of Laser Micro/Nanoengineering}}, note = {{Accessed on 2024/12/22}}}