TY  - JOUR

T1  - A Mass Spectral Investigation of the RF Plasmas of Small Organic Compounds: An Investigation of the Plasma-Phase Reactions in the Plasma Deposition from Allyl Amine

JO  - Plasmas and Polymers

UR  - http://dx.doi.org/10.1023/b:papo.0000005941.22674.75

PY  - 1998/01/01

AU  - Beck AJ

AU  - Candan S

AU  - France RM

AU  - Jones FR

AU  - Short RD

ED  - 

DO  - DOI: 10.1023/b:papo.0000005941.22674.75

PB  - Springer Science and Business Media LLC

VL  - 3

IS  - 2

SP  - 97

EP  - 114

Y2  - 2024/12/22

ER  -