@article{article, title  = {{Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography}},

 url = {{}},

 year = {{2011}},

 month = {{1}},

 author = {{Toriz-Garcia JJ and Williams GL and McWilliam R and Seed NL and Purvis A and Soulard FB and Cowling JJ and Ivey PA}},

 doi = {{10.1088/0960-1317/21/8/085034}},

 volume = {{21}},

 journal = {{J MICROMECH MICROENG}},

 issue = {{8}},

 note = {{Accessed on 2024/12/22}}}