TY  - CONF

T1  - High fidelity microlithography patterning using computer generated holograms

JO  - Optics InfoBase Conference Papers

PY  - 2009/01/01

AU  - McWilliam R

AU  - Purvis A

AU  - Williams G

AU  - Toriz-Garcia J

AU  - Seed L

AU  - Ivey P

ED  - 

SN  - 9781557528711

Y2  - 2024/10/18

ER  -