TY - CONF T1 - High fidelity microlithography patterning using computer generated holograms JO - Optics InfoBase Conference Papers PY - 2009/01/01 AU - McWilliam R AU - Purvis A AU - Williams G AU - Toriz-Garcia J AU - Seed L AU - Ivey P ED - SN - 9781557528711 Y2 - 2024/12/22 ER -