@inproceedings{inproceedings, title  = {{High fidelity microlithography patterning using computer generated holograms}},

 url = {{}},

 year = {{2009}},

 month = {{1}},

 author = {{McWilliam R and Purvis A and Williams G and Toriz-Garcia J and Seed L and Ivey P}},

 isbn = {{9781557528711}},

 journal = {{Optics InfoBase Conference Papers}},

 note = {{Accessed on 2024/12/22}}}