Measuring the thickness of thin films

A flexible system for the in-process, full-width thickness measurement of thin films and the quality control of thin coatings.

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We would like to better understand how our solution might serve your thin film thickness measurement or coating inspection requirements. Please get in touch if you would like to discuss.

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Background

The contribution of solar power to global energy generation is expected to grow to 22% by 2050. This growth is driving technological innovations in the solar cell industry, including those relating to thin film semiconductors. However, better solutions are needed for the in-line inspection of such thin films during manufacturing to address current challenges relating to scalability, flexibility and cost.

Solar power is just one example of a sector that has a requirement for the measurement or inspection of thin films or coatings. There are many similar applications across a wide range of sectors including aerospace, automotive, electronics, energy, food, medical and optics/lighting.

Solution

Our innovative modular reflectometer concept can be used to create an array of sensors for the full-width inspection of thin films without the need for external light sources or spectrometers.

Capability Verified Performance Likely Potential Capability
Film thickness 100 - 500 nm Up to 1 碌m
Coating material SiO2 All oxides and PEDOT-PSS
Number of coating layers 1 3
Substrates Si Oxides and metals
Width coverage 8 cm (5 sensors) Unlimited
Inspection speed 0.1 - 2.8 m/min To be determined
Angle variations +/- 0.5o N/A
Inspection distance 6 mm 10 mm

Benefits

  1. Real-time in-process inspection. 
  2. Superior scalability - the ability to 鈥渟tack鈥 multiple sensors for increased measurement/inspection width.
  3. Compact - occupies a smaller space envelope than competitive measurement solutions.
  4. Wireless potential - for 鈥淚nternet of Things鈥 integration.